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SEMI D50-0316 (technical revision)
SEMI E4-86 (technical revision)
If specific inlet challenge(s) and/or inlet measurements are required
この仕様は，高圧ガスシリンダに充填された窒素に適用される。パイプライン・ガスには適用されない。
The purpose of this Document is to provide specifications for phosphine (PH3) that are used in the semiconductor industry
G02500 - SEMI G25 - Test Method for Measuring the Resistance of Package Leads Revision:SEMI G25-89 (Reapproved 0811) - Inactive SEMI D50-0316 (technical revision)This Standard was technically approved by the global Assembly & Packaging Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on July 1, 2011. Available at www. semiviews. org and www. semi. org in August 2011; originally published in 1984; previously published in 1989. This Document defines the equipment, materials, and procedure used to measure the resistance of leads in packaging elements.
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